JPH0351986U - - Google Patents

Info

Publication number
JPH0351986U
JPH0351986U JP1989110834U JP11083489U JPH0351986U JP H0351986 U JPH0351986 U JP H0351986U JP 1989110834 U JP1989110834 U JP 1989110834U JP 11083489 U JP11083489 U JP 11083489U JP H0351986 U JPH0351986 U JP H0351986U
Authority
JP
Japan
Prior art keywords
processing head
shutter
dust collection
dust
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989110834U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989110834U priority Critical patent/JPH0351986U/ja
Publication of JPH0351986U publication Critical patent/JPH0351986U/ja
Pending legal-status Critical Current

Links

JP1989110834U 1989-09-25 1989-09-25 Pending JPH0351986U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989110834U JPH0351986U (en]) 1989-09-25 1989-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989110834U JPH0351986U (en]) 1989-09-25 1989-09-25

Publications (1)

Publication Number Publication Date
JPH0351986U true JPH0351986U (en]) 1991-05-21

Family

ID=31659341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989110834U Pending JPH0351986U (en]) 1989-09-25 1989-09-25

Country Status (1)

Country Link
JP (1) JPH0351986U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019082972A1 (ja) * 2017-10-25 2020-11-26 株式会社ニコン 加工装置、及び、移動体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019082972A1 (ja) * 2017-10-25 2020-11-26 株式会社ニコン 加工装置、及び、移動体の製造方法
US12208469B2 (en) 2017-10-25 2025-01-28 Nikon Corporation Processing apparatus and method using irradiation apparatus having a partition member

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